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Pub. ID 3563
| Internal author | Old internal author |
Title:
Structural fabrication using cesium chloride island arrays as a resist in a fluorocarbon reactive ion etching plasma
Authors:
Tsuchiya S., Green M. and Syms R.R.A.
Publication:
"Structural fabrication using cesium chloride island arrays as a resist in a fluorocarbon reactive ion etching plasma", Tsuchiya S., Green M. and Syms R.R.A. , Electrochemical and Solid-State Letters 3 (1) pp.44-46 (2000)
Publication Date:
01/01/2000
ISBN:
ISSN:
Abstract: