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Pub. ID 6263
| Internal author | Old internal author |
Title:
A single-sided process for differentially cooled electrothermal microactuators
Authors:
H.Veladi, R.R.A.Syms and H.Zou
Publication:
"A single-sided process for differentially cooled electrothermal microactuators", H.Veladi, R.R.A.Syms and H.Zou, J. Micromech. Microeng. 18 (5) pp.055033 (2008)
Publication Date:
01/05/2008
ISBN:
ISSN:
Abstract: