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Pub. ID 8179
| Internal author | Old internal author |
Title:
BURIED CHANNEL WAVE-GUIDES IN PLASMA-ENHANCED CHEMICAL VAPOR-DEPOSITED SILICON OXYNITRIDE LAYERS ON SILICON SUBSTRATES, FORMED BY ELECTRON-BEAM IRRADIATION
Authors:
LEWANDOWSKI J, SYMS RRA, MADDEN S and GREEN M
Publication:
"BURIED CHANNEL WAVE-GUIDES IN PLASMA-ENHANCED CHEMICAL VAPOR-DEPOSITED SILICON OXYNITRIDE LAYERS ON SILICON SUBSTRATES, FORMED BY ELECTRON-BEAM IRRADIATION", LEWANDOWSKI J, SYMS RRA, MADDEN S and GREEN M, OPTICAL AND QUANTUM ELECTRONICS 23 (6) pp.703-711 (1991)
Publication Date:
01/07/1991
ISBN:
ISSN:
0306-8919
Abstract:
It is shown that buried channel waveguides may be formed from a bilayer planar guide (made by plasma-enhanced chemical vapour deposition of silicon oxynitride) by bombardment with low-energy electrons. This results in an expansion of the material, and he