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Pub. ID 8207
| Internal author | Old internal author |
Title:
THIN-FILM INORGANIC RESISTS FOR SUBMICRON FABRICATION
Authors:
KHALEQUE F and GREEN M
Publication:
"THIN-FILM INORGANIC RESISTS FOR SUBMICRON FABRICATION", KHALEQUE F and GREEN M, JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B 8 (3) pp.467-469 (1990)
Publication Date:
01/05/1990
ISBN:
ISSN:
1071-1023
Abstract: